Comparison ledger
Pfeiffer Hicube 80 Eco Turbo, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Hicube 80 Eco TurboPfeiffer | |
|---|---|---|
| OEM | Pfeiffer | Tri |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Pfeiffer Hicube 80 Eco Turbo | Tri -Mist 850 Electronic Air Filter |
| Cited variants | — | |
| Specifications | ||
| Configuration | 115-230 V[3] | — |
| Type | Turbo pumping station[4] | — |
| Turbopump | HiPace 80[1] | — |
| Backing pump | MVP 015-2[1] | — |
| Inlet flange | DN 63 ISO-K / DN 63 CF / DN 40 ISO-KF[1] | — |
| Pumping speed for N₂ (DN 63 ISO-K) | 67 l/s[4] | — |
| Pumping speed for N₂ (DN 40 ISO-K) | 65 l/s[5] | — |
| Ultimate pressure | < 1 × 10⁻⁷ hPa[4] | — |
| Ultimate pressure without gas ballast | < 1 × 10⁻⁷ hPa[4] | — |
| Cooling method | Air (forced convection)[4] | — |
| Mains voltage | 100 – 240 V[4] | — |
| Mains frequency | 50/60 Hz[4] | — |
| Power consumption | 170 W[4] | — |
| Sound pressure level | ≤ 50 dB(A)[4] | — |
| Weight (DN 63 ISO-K) | 12.1 kg[4] | — |
| Weight (DN 40 ISO-K) | 17 kg[5] | — |
| Ambient temperature | +5 °C to +40 °C[1] | — |
| Protection category | IP 20[1] | — |
| Protection class | I[1] | — |
| Electronic drive unit | TC 110[1] | — |
| Power supply pack | TPS 110[1] | — |
| Display and control unit (option) | DCU 002[1] | — |
| Manufacturer | Pfeiffer[3] | — |
| Model | Hicube 80 Eco[3] | — |
| Control unit | DCU 002[3] | — |
| Cooling | Air cooling; water cooling optional[1] | — |
| Inlet flange variants | DN 63 ISO-K; DN 63 CF-F; DN 40 ISO-KF[1] | — |
| Pumping speed for N2 | 67 l/s[1] | — |
| Backing pump pumping speed at 50 Hz | 0.5 m3/h[1] | — |
| Mains requirement | 110 V, 50/60 Hz; 230 V, 50/60 Hz[1] | — |
| Weight | 17 kg[1] | — |
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