Comparison ledger
Pfeiffer ACP28G, Pfeiffer ATH1603M, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ACP28GPfeiffer | ATH1603MPfeiffer |
|---|---|---|
| OEM | Pfeiffer | Pfeiffer |
| Category | Deposition | Deposition |
| Wafer size | 100mm | 100mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Pfeiffer ACP28G | Pfeiffer ATH1603M |
| Cited variants | — | |
| Specifications | ||
| Pump type | Dry pump[6] | — |
| Role | Loadlock primary pump[6] | Turbo pump[6] |
| Manufacturer | Pfeiffer[6] | — |
| Contextual system | EVA 451 evaporator[6] | — |
| Intended application | Pumping traces of corrosive gas[7] | — |
| Pumping mechanism | Frictionless multi-stage roots design[7] | — |
| Voltage range | 90 to 254 VAC at 50 or 60 Hz[7] | — |
| Overhaul interval | 22,000 hours[7] | — |
| System location | — | Chamber secondary pump[6] |
| Associated system | — | EVA 451 thermal evaporator[6] |
| Supported wafer sizes in associated system | — | 100 mm wafers; 150 mm wafers[6] |
| Pumping speed (N₂) | — | approx. 1,400–1,600 l/s[1] |
| Ultimate pressure | — | up to approx. 6 × 10⁻⁹ mbar[1] |
| Rated speed | — | 39,000 rpm[1] |
| Bearing type | — | Magnetic bearing (MagLev)[1] |
| Cooling | — | Water-cooled[1] |
| Inlet flange | — | DN250 ISO-F (with protective grille) / DN200 ISO-F[1] |
| Outlet flange | — | KF40 (NW40, ISO-KF40)[1] |
| Motor parameters | — | 44 Vrms, 1,300 Hz, 7 Arms[5] |
| Controller | — | External electronics required (e.g., MAGPOWER controller)[5] |
| Bearing | — | Magnetic bearing[1] |
| Motor voltage | — | 44 Vrms[1] |
| Motor frequency | — | 1,300 Hz[1] |
| Motor current | — | 7 Arms[1] |
| Country of origin | — | France[4] |
| Inlet flange (alternate) | — | 200 CF-F[2] |
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