Waferpedia

Comparison ledger

OLS 31 SUversusOLS 5100 SAF

Olympus OLS 31 SU, Olympus OLS 5100 SAF, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OLS 31 SUOlympus
OEMOlympusOlympus
Category—Metrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOlympus OLSOlympus OLS
Specifications
ConfigurationMissing parts[1]High magnification[3]
ManufacturerOlympus[1]—
ModelOLS 31 SU[1]—
Product familyOlympus OLS family[2]—
Inventory asset number70381[1]—
Equipment type—microscope system[4]
Magnification—high magnification[3]
Imaging—differential interference contrast (DIC)[3]
Stage—motorized stage[3]
Desk—anti-vibration desk[3]
Included—computer and software[3]
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com