Comparison ledger
Novellus 3290, Novellus 3290 STQ, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 3290Novellus | 3290 STQNovellus |
|---|---|---|
| OEM | Novellus | Novellus |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Novellus 3290 | Novellus 3290 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | ECS 3000 or MST 3000[2] | Recent model control system[4] |
| Process type | PVD sputter physical vapor deposition[2] | — |
| Wafer size | 6 inch[2] | — |
| Configuration options | ECS 3000 or MST 3000[3] | — |
| Phase | — | 3 Phase[4] |
| Frequency | — | 50 Hz[4] |
| DC Power Supply | — | 12 / 12 / 12 kW, 208 V[4] |
| Load Lock Pump | — | Varian V 70 Turbo Pump[4] |
| Wafer Size | — | 6 inch[5] |
| Power Supply Phase/Frequency | — | 3 Phase, 50 Hz[4] |
| Optional DC Power Supply | — | 6 / 6 / 12 kW, 208 V (option for 12 /12 / 12 kW AE Pinnacle at 400 V)[4] |
| Control System | — | Recent model control system with touch screen from both sides[4] |
| Temperature Controller | — | Latest version[4] |
| Cryo Pumps | — | CTI Cryo Pumps[4] |
| Water Pumps | — | Included[4] |
| Mass Flow Controllers | — | Upgrade to MFC vs. needle valve[4] |
| Pressure Controller | — | New[4] |
| Preheating | — | Installed Heater for Preheating (no RF Etch Position)[4] |
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