Comparison ledger
Nikon R10, SUSS MicroTec MA6-BA6, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | R10Nikon | MA6-BA6SUSS MicroTec |
|---|---|---|
| OEM | Nikon | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | 1986 | — |
| Production run | 1973–1979 | — |
| Lifecycle | Discontinued | — |
| Lifecycle milestones | 1979 Movie camera business discontinued | — |
| Control system | — | — |
| Generation | i-line | — |
| Family | Nikon R10 | SUSS MicroTec MA6-BA6 |
| Cited variants |
|
|
| Specifications | ||
| wafer size | 150 mm[3] | — |
| exposure wavelength | i-line (365 nm)[3] | — |
| introduced | 1986[3] | — |
| technology generation | i-line[3] | — |
| Type | Silent super 8 cartridge movie camera[4] | — |
| Lens | Cine Nikkor Zoom, f: 1.4, F: 7-70 mm, zooming ratio 10x[4] | — |
| Lens optical construction | 10-group 14-element zoom lens[1] | — |
| Focusing | Manual, split image; macro focusing yes[4] | — |
| Zooming | Auto with 2 speeds and manual[4] | — |
| Filter size | 67 mm[4] | — |
| Viewfinder | Single-lens reflex with adjustable eyepiece; viewfinder information includes aperture scale[4] | — |
| Exposure control | Auto and manual; TTL Electric Eye; EE lock yes; exposure compensation +/-2 stops[4] | — |
| Film speed | Auto between 10/16 and 400/650 ASA (daylight/tungsten)[4] | — |
| Filter | Built-in 85A filter, coupled with movie light socket[4] | — |
| Filming speeds | 18, 24, 54 fps, single frame[4] | — |
| Shutter opening angle | Variable shutter; positions 0°, 40°, 80° and 160°[4] | — |
| Fading | Auto and manual fade-in/fade-out[4] | — |
| Rewinding / reverse filming | 100 frames approx, double exposure and lap dissolve; reverse filming 100 frames approx[4] | — |
| Sound | Double system, sound recording with synchronized tape recorder[4] | — |
| Connectors | Remote control socket yes; movie light socket Kodak type with filter control; flash synchronization socket yes[4] | — |
| Power source | 6 x AA batteries only; film drive motor DC micromotor[4] | — |
| Weight | 1930 g[4] | — |
| Dimensions | 68 x 260 x 200 mm[4] | — |
| Tripod socket | 1/4"[4] | — |
| Maker | Made in Japan by Nippon Kogaku[4] | — |
| System name | — | JBX 6300FS[5] |
| Tool type | — | advanced direct write ebeam lithography system[5] |
| Wafer capacity | — | up to 150mm wafers[5] |
| Feature size capability | — | sub-10 nm features[5] |
| Optical configuration | — | a fifth lens can be used to get a smaller beam spot size[5] |
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