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Comparison ledger

05 LHP 151versus3D

Melles Griot 05 LHP 151, Zygo 3D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
3DZygo
OEMMelles GriotZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMelles Griot 05Zygo 3D
Cited variants—
  • Z3D-7000[1]
  • NewView 600s[1]
  • NewView 6000 Series[1]
Specifications
ConfigurationWith 05 LPL 340 Power Supply (Does not power on)[2]—
Equipment typeLaser[2]—
MakeMelles Griot[2]—
Model05 LHP 151[2]—
Power stateDoes not power on[2]—
Measurement type—Fast, noncontact, high-accuracy, 3D metrology of surface features[1]
Software—MetroPro software[1]
Applications—Characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com