Waferpedia

Comparison ledger

120 ContinuousversusSR 2000 A

Lapmaster 120 Continuous, SCREEN SR 2000 A, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SR 2000 ASCREEN
OEMLapmasterSCREEN
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousSCREEN SR 2000 A
Specifications
Configuration—4 cup Solvent PR stripper[1]
Gas—SSTA2[1]
OS—PLC based system[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing