Comparison ledger
Lam Research Gasonics L 3500, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gasonics L 3500Lam Research | 11600 SRDSemitool |
|---|---|---|
| OEM | Lam Research | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Gasonics L 3500 | Semitool 11600 SRD |
| Specifications | ||
| Process type | Plasma Asher[1] | — |
| Wafer size | 12 inch[2] | — |
| Process gases | O2 and N2[1] | — |
| Robot upgrade | HINE Hatm 5.0 atmospheric robot arm[3] | — |
| Weight | 200 kg[3] | — |
| Configuration | — | Ceramic[4] |
| Manufacturer | — | Semitool[4] |
| Model | — | 11600 SRD[4] |
| Equipment type | — | Spin Rinse Dryer[4] |
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