Comparison ledger
KLA Alpha Step 500, KLA SFS 6420 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Alpha Step | KLA SFS |
| Specifications | ||
| Configuration | Does not include PC / Software[1] | MAIN BODY:[7] |
| Wafer size | - Up to 6"/150mm Wafer Capable[2] | Non patterned wafer particle inspection, 150 mm & 200 mm compatible[7] |
| - Repeatability | 10Å (1s) or 0.1%[2] | — |
| Type | Profilometer[3] | — |
| Description | Surface Profiler[4] | — |
| Wafer size range | 100mm~200mm[4] | — |
| Vertical range option | 2 mm[3] | — |
| Data export format | ASCII file[3] | — |
| Measurement capabilities | Measures roughness, waviness, and stop height[4] | — |
| Phase | — | 1 Phase[6] |
| Frequency | — | 60Hz[6] |
| Voltage | — | 208V[6] |
| Install Type | — | stand-alone[7] |
| Source | — | Algon Laser[7] |
| Handler | — | 150 mm & 200 mm Single Open, puck type[7] |
| OS Version | — | Windows 98[7] |
| System Software | — | 4.2[7] |
| Power | — | 208V, 1 phase, 50/60Hz[7] |
| Vacuum | — | ~-23inHg (Spec: >-20inHg / Quick connection)[7] |
| External Exhaust | — | 4" diagram, 2 holes for system and laser[7] |
| Inspection type | — | Non patterned wafer particle inspection[7] |
| Wafer size compatibility | — | 150 mm & 200 mm compatible[7] |
| Light source | — | Algon Laser[7] |
| System software version | — | 4.2[7] |
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