Comparison ledger
KLA .498 PSL Wafer, Onto Innovation NSX 105 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 105 WaferOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Onto Innovation NSX 105 |
| Specifications | ||
| Configuration | NIST Traceable[1] | X_Stage encoder issues[2] |
| NIST traceability | Yes[1] | — |
| Manufacturer | — | Onto Innovation[3] |
| Category | — | Metrology & Inspection[3] |
| Model | — | NSX 105 Wafer[3] |
| Wafer size | — | 300 mm[4] |
| Inspection type | — | Macro defect inspection system[4] |
| Alternate designation | — | NSX 105 Macro Defect[4] |
| Issue noted | — | X_Stage encoder issues[2] |
| Missing parts | — | NSK Controller; Matrox PC; 24 Volt PS Stage[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →