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.498 PSL WaferversusMX 61 F

KLA .498 PSL Wafer, Olympus MX 61 F, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
MX 61 FOlympus
OEMKLAOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferOlympus MX 61
Specifications
ConfigurationNIST Traceable[1]Optics UIS Optics[2]
NIST traceabilityYes[1]—
Optics—UIS Optics[2]
Wafer loader—Loader AL 110[3]
Stand—Microscope stand[2]
Nosepiece—Nosepiece[2]
Observation tube—Observation tube[2]
Stage—Stage[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com