Comparison ledger
KLA .496 PSL Wafer, Thermo Fisher Scientific FEI Tecnai T 12 TEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Tecnai T 12 TEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Thermo Fisher Scientific FEI Tecnai T 12 TEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Ion pump replaced 2020[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[4] |
| Instrument type | — | Transmission Electron Microscope[3] |
| Ion pump | — | replaced 2020[3] |
| PC, ODP heater, and hand panels | — | replaced 2024[3] |
| Wehnelt | — | current LaB6 source functional[3] |
| Detector | — | MultiScan CCD[3] |
| EDS system | — | Oxford Inca EDS system, left off of the instrument since 2021 due to a pressure issue[3] |
| Vintage | — | 2003[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →