Comparison ledger
KLA .496 PSL Wafer, Olympus BHMJL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | BHMJLOlympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Olympus BHMJL |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[4] |
| OEM | — | Olympus[3] |
| Model | — | BHMJL[3] |
| Instrument type | — | Microscope[3] |
| Application | — | Materials applications[5] |
| Imaging mode | — | Brightfield, darkfield, and DIC[5] |
| Viewing head | — | Trinocular head with 1x C-mount[5] |
| Eyepieces | — | Pair of 10x20 WK eyepieces[5] |
| Reflected light module | — | BH2-UMA reflected light module with lamphouse[5] |
| Illumination controls | — | Rotating polarizer, analyzer, ND12, and lambda quarter wave plate[5] |
| Nosepiece | — | 4-position[5] |
| Objectives | — | NeoSPlan B.D. 5x, 10x, 20x, 50x, and 100x objectives; ULWD NeoSPlan B.D. 50x objective; DIC prism on 50x and 100x[5] |
| Stage | — | Semprex XY stage with 360 degree rotating insert[5] |
| Illumination | — | Halogen[5] |
| Light source | — | 12V 50W halogen lamphouse[4] |
| Stage size | — | 6x6 stage[6] |
| Stage type | — | Right-handed mechanical stage with glass stage plate[4] |
| Warranty | — | 1 year[5] |
| Type | — | Metallurgical reflected-light microscope[4] |
| Configured modalities | — | Brightfield, darkfield, and DIC[5] |
| Head | — | Trinocular head[5] |
| Illumination type | — | Halogen[5] |
| Top light | — | Top light[6] |
| Objective count | — | 3 plan objectives[6] |
| Contrast modes | — | Brightfield/darkfield[6] |
| Ocular magnification | — | 10x magnification[7] |
| Camera | — | Top mounted JVC C-mount digital camera KY-F75U[7] |
| Serial number | — | 201181[7] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →