Comparison ledger
KLA .496 PSL Wafer, Leica DM800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DM800Leica | |
|---|---|---|
| OEM | KLA | Leica |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Leica DM800 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Type | — | Inspection microscope with digital camera[3] |
| Model | — | Leica DM800[3] |
| Locations | — | Z01, Z02, Z06, Z07, Z11, Z15, Z18[3] |
| Accessories | — | Yellow filter; DIC; IR BS light[3] |
| Accessory note | — | Z01 and Z15 only; Z02 only[3] |
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