Comparison ledger
KLA .204 PSL Wafer, Veeco NT 9100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NT 9100Veeco | |
|---|---|---|
| OEM | KLA | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Veeco NT 9100 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[2] | — |
| NIST Traceable | Yes[2] | — |
| Type | — | Profilometer[4] |
| Measurement capability | — | Non-contact, three-dimensional, topography and film thickness[5] |
| Vertical resolution | — | <0.1 nm RMS[5] |
| Objectives | — | 1.5X, 2.5X, 5X, 10X, 20X, 50X; long working distance objectives available; optional motorized turret; optional through transmissive media objectives[5] |
| Field-of-view multipliers | — | 0.55X, 0.75X, 1X, 1.5X, 2X[5] |
| Measurement array | — | 640 x 480, non-interlaced; optional 1392 x 1040 camera[5] |
| Light source | — | Long-lifetime green and white LEDs[5] |
| Optical assembly | — | Dual LED illuminator; three-position FOV turret; closed-loop; 10 mm scan[5] |
| Stages | — | Automated 100 mm Z-axis; ±6° tip/tilt stage; 100 mm XY manual stage standard; 150 mm XY auto stage optional[5] |
| Vertical scan speed | — | User-selectable up to 24 μm/sec[5] |
| Lateral spatial sampling | — | 0.1 to 13.2 μm (≤160 nm with high resolution camera)[5] |
| Optical resolution | — | 0.49 μm min.[5] |
| Field of view | — | 7.68 x 5.76 mm max, 0.06 x 0.05 mm min with standard-resolution camera; 7.84 x 5.87 mm max, 0.09 x 0.07 mm min with high-res camera[5] |
| Reflectivity | — | <1 to 100%[5] |
| Step height | — | 0.8% accuracy; <0.1% at 1σ repeatability[5] |
| Profiler footprint | — | 320 mm W x 510 mm D x 645 mm H; 70 kg[5] |
| Certification | — | CE, NRTL[5] |
| Vertical Measurement Range | — | 0.1nm to 10mm[5] |
| Repeatability | — | 0.05nm[5] |
| Field-of-View | — | 7.68 x 5.76mm max, 0.06 x 0.05mm min with standard-resolution camera; 7.84 x 5.87mm max, 0.09 x 0.07min with high-resolution camera[5] |
| Step Height Accuracy | — | 0.8% accuracy; <0.1% at 1σ repeatability[5] |
| Footprint | — | 320mm W x 510mm D x 645mm H; 70kg (excluding peripheral electronics and air table)[5] |
| Computer System | — | Latest Dell with 24/7 support line; Software Vision running under Microsoft Windows XP Professional[5] |
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