Waferpedia

Comparison ledger

.204 PSL WaferversusHS 1000 Scanning Acoustic

KLA .204 PSL Wafer, Sonix HS 1000 Scanning Acoustic, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLASonix
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferSonix HS 1000 Scanning Acoustic
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com