Waferpedia

Comparison ledger

.204 PSL WaferversusMX 50 A F

KLA .204 PSL Wafer, Olympus MX 50 A F, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MX 50 A FOlympus
OEMKLAOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferOlympus MX 50 A F
Specifications
ConfigurationNIST Traceable[1]Optical System[3]
Wafer Size8 inch[1]8 inch[3]
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Focusing—Roller Guide[4]
Wafer Thickness—More than 400 um[3]
Cassette Type—Fluoroware[3]
Manufacturer—Olympus[3]
Model—MX 50 A F[3]
Category—Metrology & Inspection[4]
Loader—AL 100[3]
Optical System—Listed[4]
Illumination—Listed[4]
Electrical System—Listed[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com