Waferpedia

Comparison ledger

1007versusS-460

KLA 1007, Signatone S-460, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
S-460Signatone
OEMKLASignatone
CategoryTest & ProbeTest & Probe
Wafer size—6"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—Windows
Generation——
FamilyKLA 1007Signatone S-460
Specifications
ManufacturerKLA[1]—
Model1007[1]—
DescriptionWafer Prober[1]—
Wafer size150 mm[1]6"[3]
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]—
Probe station type—Semi-automatic probe station[3]
Wafer stage drive—Proprietary linear induction motor[3]
Positioning system—Optical feedback positioning system[3]
Wafer stepping—Automated wafer stepping controlled via Signatone Solutions Windows software[3]
Theta—Motorized theta with a quick two-point align feature[3]
Control era—Windows[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org
  4. [4]waferpedia.comwaferpedia.com