Comparison ledger
KLA 1.112 PSL Wafer, Orbotech Ultra Fusion Series, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Ultra Fusion SeriesOrbotech | |
|---|---|---|
| OEM | KLA | Orbotech |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Orbotech Ultra Fusion Series |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Min L/S [μm] | — | 5/5[3] |
| Min defect size [μm] | — | 1.2[3] |
| Auto focus | — | Yes[3] |
| Vibrations | — | No[3] |
| Magnification | — | 220x-5000x[3] |
| Field of View | — | 1.2mm – 0.19mm[3] |
| White Illumination | — | 3 independently controlled Illumination types (LED-based): coaxial, diffusive, grazing[3] |
| UV Illumination | — | Controllable UV illumination[3] |
| Image processing | — | Yes[3] |
| Average time between defects [s] | — | 0.7[3] |
| Image Display | — | 23"[3] |
| Operating system | — | Linux[3] |
| Min L/S | — | 5/5 μm[3] |
| Min defect size | — | 1.2 μm[3] |
| Average time between defects | — | 0.7 s[3] |
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