Comparison ledger
KLA 1.112 PSL Wafer, Nikon MM40, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MM40Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Nikon MM40 |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[4] | — |
| Wafer Size | 8 inch[4] | — |
| NIST Traceable | True[4] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[5] | — |
| equipment name | — | Nikon MM 40[6] |
| equipment type | — | inspection and 2-D metrology microscope[6] |
| section | — | Inspection Microscope without Camera[6] |
| location | — | Z05[6] |
| option | — | Measurement XYZ[6] |
| Type | — | Inspection and 2-D metrology microscope[6] |
| Measurement capabilities | — | XY and Z (Measurement XYZ)[6] |
| Original illuminator power (halogen) | — | 20W[1] |
| Stage | — | Measurement XYZ[6] |
| Original Illuminator Power (20W variant) | — | 20W halogen[1] |
| Original Illuminator Power (50W standard variant) | — | 50W halogen[2] |
| Original Illuminator Power (50W high power variant) | — | 50W halogen (high power)[3] |
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