Waferpedia

Comparison ledger

0035235-003 MMD HeadversusNSX 105 Wafer

KLA 0035235-003 MMD Head, Onto Innovation NSX 105 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
NSX 105 WaferOnto Innovation
OEMKLAOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadOnto Innovation NSX 105
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]X_Stage encoder issues[2]
Model0035235-003[1]NSX 105 Wafer[3]
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Manufacturer—Onto Innovation[3]
Category—Metrology & Inspection[3]
Wafer size—300 mm[4]
Inspection type—Macro defect inspection system[4]
Alternate designation—NSX 105 Macro Defect[4]
Issue noted—X_Stage encoder issues[2]
Missing parts—NSK Controller; Matrox PC; 24 Volt PS Stage[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com