Waferpedia

Comparison ledger

0035235-003 MMD HeadversusLV100

KLA 0035235-003 MMD Head, Nikon LV100, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
LV100Nikon
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadNikon LV100
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]—
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Instrument type—Polarized microscope with heating stage[2]
Listed model—Nikon LV100 POL[2]
Illuminator—EPI Illuminator with bright and darkfield[2]
Objectives—5X, 10X, 20X, 50X, 100X objectives[2]
Camera head—Color camera head[2]
Heating stage—Instec HCS 3 heating stage[2]
Heating stage temperature range—-190 to 400 °C[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]snsf.stanford.edusnsf.stanford.edu