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S 9260 A CD-SEMversus.204 PSL Wafer

Hitachi S 9260 A CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
S 9260 A CD-SEMHitachi
.204 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 9260KLA .204 PSL Wafer
Specifications
ConfigurationSingle phase[1]NIST Traceable[3]
MakeHitachi[2]—
ModelS 9260 A[2]—
Wafer Size8 inch[1]8 inch[3]
Power ConfigurationSingle phase[1]—
Traceability—NIST[4]
Compatible Tools—Surfscan 6xy0, Sp1[3]
NIST Traceable—Yes[3]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com