Comparison ledger
Hitachi CS 4800 CD-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CS 4800 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi CS 4800 CD-SEM | KLA .496 PSL Wafer |
| Specifications | ||
| Voltage | 208V, 60Hz[1] | — |
| Configuration | Dual cassette[1] | NIST Traceable[2] |
| Nominal Voltage / Frequency | 208V, 60Hz[1] | — |
| Wafer Size | 3, 4, 8 inch[1] | — |
| Frequency | 60 Hz[1] | — |
| Wafer Handling | Dual cassette[1] | — |
| Recirculating Chiller | Haskris R050-HHT-BHK(R2)-SEMI-50/60HZ[1] | — |
| Vacuum Pump | Edwards iXL120E[1] | — |
| System Terminal | NEC FC98-NX FC-E21G[1] | — |
| Control Laptop | Dell Latitude Control Laptop (2017 vintage)[1] | — |
| Wafer size | — | 8 inch[2] |
| Traceability | — | NIST Traceable[2] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[2] |
| Category | — | Metrology & Inspection[3] |
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