Comparison ledger
Hitachi 1305 BSG 3, SCREEN FC 821 L, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | FC 821 LSCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | Wafer Transfer Machine |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN FC 821 |
| Specifications | ||
| Process | — | SiGe[1] |
| Configuration | — | Carrier Transfer Robot[1] |
| Wafer size | — | Wafer Transfer Machine[1] |
| Current | — | 3 φ 200 V, 125 A[1] |
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