Comparison ledger
Hitachi 1305 BSG 3, Lam Research Gasonics PEP 3510 Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | Gasonics PEP 3510 PlusLam Research |
|---|---|---|
| OEM | Hitachi | Lam Research |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Lam Research Gasonics PEP 3510 |
| Cited variants | — |
|
| Specifications | ||
| Power | — | 2 KW MW Generator[2] |
| Wafer Size | — | 8 inch[2] |
| MW Generator Power | — | 2 kW[3] |
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