Waferpedia

Comparison ledger

1088versusPB8

Heller 1088, YES PB8, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1088Heller
PB8YES
OEMHellerYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size—Up to 8-inch wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller 1088YES PB8
Cited variants—
  • YES-PB8 High Vac[1]
  • YES-PB8 High Vac Specs[1]
  • PB12[1]
Specifications
Heating Zones8 zones (4 top and 4 below) plus 1 cooling zone[2]—
Heating MethodForced convection[2]—
Conveyor Width18 inches (45 cm)[2]—
Heated Length43.5 inches (111 cm)[2]—
Overall Length96 inches (244 cm)[2]—
Height50 inches (127 cm)[2]—
Net Weight900 lbs (409 kg)[2]—
Thermal ProfilerIncluded[2]—
Oven TopCounter balance for easy access to conveyor[2]—
Solder CompatibilityLead-free and leaded soldering[2]—
Capacity—Up to two boats of 8-inch wafers[3]
Ramp rate—1-5°C/min[3]
Cool-down rate—1-5°C/min[3]
Max temperature—450°C[3]
Idle temperature—50°C[3]
Gas/material compatibility—Non-toxic and non-flammable gases/materials only[3]
Vacuum level—High vacuum; tool overview states 10^-5 Torr[1]
Wafer size support—Up to 200mm wafers[1]
Load type—Manual load[1]
Process atmosphere—Filtered heated nitrogen purging the chamber in a laminar flow[3]
Compatibility—4 - Glass and Metal; no low-temperature materials unstable below 500C; no high-vapor-pressure materials; non-toxic and non-flammable gases/materials only[3]
Series vacuum level—High vacuum (10^-5)[1]
Operating temperatures for wafer dehydration—150°C to 450°C[1]
Laminar flow pressure range—0.50-500 Torr[1]
Evacuation capability—Down to 1E-5 Torr using a vacuum turbo pump[1]
Cooling package—Uses air only, no water[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]smtdevices.comsmtdevices.com
  3. [3]cnfusers.cornell.educnfusers.cornell.edu