Comparison ledger
Gaertner MI108, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MI108Gaertner | |
|---|---|---|
| OEM | Gaertner | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Gaertner MI108 | KLA .496 PSL Wafer |
| Specifications | ||
| Instrument type | Light-sectioning microscope[1] | — |
| Model | MI108[1] | — |
| Concept | Schmaltz concept[1] | — |
| Light beam angle | 45°[1] | — |
| Micrometer drum graduation | 0.00002 inch per division (20 millionths)[1] | — |
| Objective magnification | 3.48X[1] | — |
| Eyepiece magnification | 10X[1] | — |
| Total magnification | 34.8X[1] | — |
| Optical working distance | 41.2 mm[1] | — |
| Standard equipment | Base, filtered light source, adjustable slit, filar micrometer eyepiece with external revolution counter, x-y positioning stage with .001 reading micrometer thimbles, fixed angular mount, vertical positioning stage[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer size | — | 8 inch[2] |
| Traceability | — | NIST Traceable[2] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[2] |
| Category | — | Metrology & Inspection[3] |
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