Comparison ledger
EV Group 101, SVG 661 HT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | 661 HTSVG |
|---|---|---|
| OEM | EV Group | SVG |
| Category | Lithography | Lithography |
| Wafer size | — | Mask / Wafer Handling: |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | SVG 661 HT |
| Specifications | ||
| OEM | EV Group[1] | SVG[4] |
| Model | 101[1] | 661 HT[4] |
| Equipment name | EVG 101 Spray Coater[1] | — |
| NEMO ID | evgspraycoat[1] | — |
| Training required | EVG 101 Training[1] | — |
| Training duration | 1.50 hours[1] | — |
| Processing technique | Resist Spray Coat (manual)[1] | — |
| Cleanliness | "All"[1] | — |
| Location | SNF Paul G Allen L107 Cleanroom[1] | — |
| Wafer diameter (substrate size) | up to 300 mm[2] | — |
| Available modules | Spin coat / OmniSpray® / develop[2] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[2] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[2] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[3] | — |
| Cleanliness group (at SNF) | "All"[1] | — |
| Configuration | — | Refurbished in 2022[4] |
| Process | — | Photo Exposure[4] |
| Heat Exchanger / Chiller | — | Blower[4] |
| Wafer size | — | Mask / Wafer Handling:[4] |
| Equipment type | — | Aligner[4] |
| Category | — | Lithography[5] |
| Optics | — | High Throughput Coated Optics (HT)[4] |
| Performance | — | Integrated Uniformity Tester[4] |
| Software | — | OS 2000 Hardware and Software v29.x or Higher[4] |
| Host link | — | SEMI-GEM E 30 & HSMS # 37 Compliant Host Link[4] |
| Chamber Type | — | M 500 / 600[4] |
| Cassette Stage | — | 150 mm no smf[4] |
| Wafer Mapping | — | Optical Sensor[4] |
| Control System | — | OS 2000[4] |
| Air Cooler | — | 39,000 BTU 220 Vac 3 Ф[4] |
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