Comparison ledger
Espec EHS-432(M), KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EHS-432(M)Espec | 1007KLA |
|---|---|---|
| OEM | Espec | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Espec EHS-432(M) | KLA 1007 |
| Specifications | ||
| Model | EHS-432(M)[1] | 1007[2] |
| Category | Highly accelerated stress test system[1] | — |
| Temperature range | +105.0°C to +162.2°C[1] | — |
| Humidity range | 75%rh to 100%rh[1] | — |
| Pressure range | 0.0196MPa to 0.392MPa (Gauge)[1] | — |
| Interior dimensions | φ548×L560mm[1] | — |
| Chamber volume | 130L[1] | — |
| Manufacturer | — | KLA[2] |
| Description | — | Wafer Prober[2] |
| Wafer size | — | 150 mm[2] |
| Convertible to 8 inch wafer size | — | Yes[2] |
| Vintage | — | 01.06.1995[2] |
| Make | — | KLA[3] |
| Equipment type | — | Prober[3] |
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