Comparison ledger
Espec EHS-222M-L, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EHS-222M-LEspec | 1007KLA |
|---|---|---|
| OEM | Espec | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Espec EHS-222M-L | KLA 1007 |
| Cited variants | — | |
| Specifications | ||
| Category | Highly accelerated stress test system (HAST chamber)[1] | — |
| Model | EHS-222M-L[1] | 1007[3] |
| Interior dimensions | φ394×L626 mm[1] | — |
| Temperature range | +105.0°C to +142.9°C[1] | — |
| Humidity range | 75% to 100% RH[1] | — |
| Pressure range (gauge) | 0.019 to 0.193 MPa[1] | — |
| Interior dimensions (diameter × depth) | φ394 × L626 mm[1] | — |
| Maximum board size | 290 × 460 mm[2] | — |
| Number of bias terminals | 120[2] | — |
| Maximum bias voltage | 1,000 V[2] | — |
| Control modes | Wet and dry bulb temperature control (M type), unsaturated control, wet saturated control[1] | — |
| Standards conformance | IEC60068-2-66,IEC60749–4,EIAJ ED-4701,JESD22-A110E,JESD22-A102E[1] | — |
| Power suppy | 200V AC 1φ 50/60Hz,220V AC 1φ 50/60HHz, 230V AC 1φ 50Hz[1] | — |
| Manufacturer | — | KLA[3] |
| Description | — | Wafer Prober[3] |
| Wafer size | — | 150 mm[3] |
| Convertible to 8 inch wafer size | — | Yes[3] |
| Vintage | — | 01.06.1995[3] |
| Make | — | KLA[4] |
| Equipment type | — | Prober[4] |
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