Waferpedia

Comparison ledger

EG5versusWL-1160

Electroglas EG5, Signatone WL-1160, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
EG5Electroglas
WL-1160Signatone
OEMElectroglasSignatone
CategoryTest & ProbeTest & Probe
Wafer size150mm150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyElectroglas EG5Signatone WL-1160
Cited variants—
Specifications
Product lineEG5|300[1]—
VariantARGOS[1]—
DescriptionElectroglas' highest accuracy 300mm wafer prober[1]—
Probe-to-pad accuracy±2.5 micron[1]—
Stepping accuracy1.0 micron[1]—
Wafer sizes handled150mm, 200mm, and 300mm wafers[1]—
Variant descriptionFine-pitch probing for in-line parametric test structures[1]—
Tool typewafer prober[1]—
Accuracy positioningprobe-to-pad accuracy of ±2.5 micron[1]—
Handled wafer sizes150mm, 200mm, 300mm[1]—
Model relationEG5|300e is a fine-pitch probing model for in-line parametric test structures[1]—
Product type—RF / Microwave Probe Station[2]
Application focus—high-frequency, high-power, and millimeter wave applications[2]
Operating characteristic—non-resonant operation is critical[2]
Chuck sizes—150mm and 200mm chucks[2]
Calibration chuck—Independent calibration chuck located adjacent to the main chuck[2]
Calibration chuck material—Non-resonant polymer[2]
Microscope stage—2" x 2" microscope stage[2]
Microscope compatibility—Supports most StereoZoom and high-powered microscopes[2]
Platform sharing—Uses the same stable platform as the S-1160 multipurpose probe station[2]
X-Y motion control—150mm & 200mm manual X-Y motion control[2]
Microscope stage control—50mm X 50mm microscope stage control[2]
Height control—Separate contact / separate and platen height control[2]
Z motion—Up to 30mm Z motion control of platen[2]
Micropositioner capacity—Holds up to four S-96MW microwave micropositioners[2]
Standard manifolds—Vacuum and DC manifolds standard[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org