Comparison ledger
Edwards EB1, Temescal 3PT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EB1Edwards | 3PTTemescal |
|---|---|---|
| OEM | Edwards | Temescal |
| Category | electron beam source | electron beam source |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Edwards EB1 | Temescal 3PT |
| Cited variants | — | |
| Specifications | ||
| type | magnetically focused electron beam source[2] | — |
| compactness | ultra-compact[2] | — |
| mounting | supplied mounted on an integral dual water feedthrough[2] | — |
| hearth volume | 1 cm3 copper hearth[2] | — |
| deposition capability | high rate, thick film depositions[2] | — |
| multi-source capability | multiple sources can be fitted for multi-layer depositions[2] | — |
| standard hearth | water-cooled copper block with a conically shaped aperture to accept a removable copper crucible[2] | — |
| crucible liners | refractory crucible liners can be fitted for evaporating aluminum and copper[2] | — |
| power rating | variable up to 3.0 kVA[2] | — |
| beam deflection | 180°[2] | — |
| beam deflection magnet | permanent magnet manufactured from Trigonal G[2] | — |
| magnet characteristics | selected for low outgassing characteristics and field stability at high temperatures[2] | — |
| power supply | EB3 5 kV 600 mA constant voltage power supply[2] | — |
| feedthroughs | supplied complete with two high vacuum feedthroughs[2] | — |
| Product line | — | PopTop Multi-Pocket E-guns[1] |
| Model | — | 3PT[1] |
| Maximum power | — | 12 kW[1] |
| Acceleration voltage | — | 4–10 kV[1] |
| Beam deflection | — | 270°[1] |
| Beam spot size/shape | — | From tight oval to diffuse oblong[1] |
| Sweep capability | — | Longitudinal and lateral[1] |
| Rotation torque | — | 10 in. lbs. (11.5 kg cm)[1] |
| Max. bakeout temperature | — | 302 °F (150 °C)[1] |
| Operating pressure | — | Maximum 5 x 10-4 torr (6.7 x 10-4 mbar); minimum 1 x 10-8 torr (1.33 x 10-8 mbar)[1] |
| Weight | — | 50.3 lbs. (22.8 kg)[1] |
| Filament current | — | 70 A at 12 V ac[1] |
| Emission current | — | 0–1.5 A at 4–10 kV dc[1] |
| Cooling water max temperature | — | 68 °F (20 °C)[1] |
| Cooling water flow rate | — | 3.0 gpm (0.19 l/sec.)[1] |
| Cooling water max inlet pressure | — | 100 psi (6.89 bar)[1] |
| Cooling water min delta pressure | — | 50 psi (3.45 bar)[1] |
| High-voltage feedthroughs | — | Two HV feedthroughs rated for 12 kV at 70 A[1] |
| Octal feedthrough | — | One octal feedthrough rated for 110 V at 3 A per lead[1] |
| Dual-pass feedthrough | — | One dual-pass feedthrough with 3/8-in. (9.5-mm) OD tubes[1] |
| Rotary feedthrough | — | One rotary-motion feedthrough with 1/4-in. (6.4-mm) dia. shaft[1] |
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