Waferpedia

Comparison ledger

DTG 8460 Wafer Backsideversus15

Disco DTG 8460 Wafer Backside, Lapmaster 15, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
15Lapmaster
OEMDiscoLapmaster
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DTG 8460Lapmaster 15
Specifications
ConfigurationIncludes DTU 1550[1]—
Chuck table for 12, and 8" is possible[1]—
Each spindle has 2 height gaugeinner and outer mechanical IPG (in-line process gauge) on Z1 and Z2 spindles respectively[1]—
Machine typeWafer backside grinder[1]—
Wafer size12 inch[1]—
AccessoryIncludes DTU 1550[1]—
Chuck tableFor 12", and 8" is possible[1]—
Robot pickerFor 12", and 8" is possible[1]—
Spinner tableFor 12", and 8" is possible[1]—
Height gaugeEach spindle has 2 height gauge: inner and outer mechanical IPG (in-line process gauge) on Z1 and Z2 spindles respectively[1]—
Input Power—110 Vac[2]
Plate Diameter—15 inches (381 mm)[3]
Number of Conditioning Rings—3[3]
Ring ID—5.5 inches (140 mm)[3]
Standard RPM—60[3]
RPM Range (Variable Speed Drive)—0-60[3]
Drive Motor - Lapper—0.5 HP (0.37 kW)[3]
Drive Motor - Polisher—0.75 HP (0.56 kW)[3]
Length—25 inches (635 mm)[3]
Width—20 inches (508 mm)[3]
Height—24 inches (610 mm)[3]
Estimated Shipping Weight—285 lbs (129.3 kg)[3]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]web.archive.orgweb.archive.org