Comparison ledger
Disco DTG 8460 Taiko, Disco DTG 8460 Wafer Backside, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DTG 8460 TaikoDisco | |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DTG 8460 | Disco DTG 8460 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 3 Chucks[2] | Includes DTU 1550[5] |
| Phase | 200-2008 V, 50 A, 50/60 Hz, 3 Phase[2] | — |
| Voltage | 208 V[3] | — |
| Wafer size | 12 inch[2] | 12 inch[5] |
| Process type | Cassette to Cassette[2] | — |
| Number of chucks | 3[2] | — |
| Current | 50 A[2] | — |
| Frequency | 50/60 Hz[2] | — |
| Add-on chiller | DTU 1531[2] | — |
| Accessories | USV, Duct Unit, Vacuum Unit[2] | — |
| Vintage year | 2012[4] | — |
| Chuck table for 12 | — | , and 8" is possible[5] |
| Each spindle has 2 height gauge | — | inner and outer mechanical IPG (in-line process gauge) on Z1 and Z2 spindles respectively[5] |
| Machine type | — | Wafer backside grinder[5] |
| Accessory | — | Includes DTU 1550[5] |
| Chuck table | — | For 12", and 8" is possible[5] |
| Robot picker | — | For 12", and 8" is possible[5] |
| Spinner table | — | For 12", and 8" is possible[5] |
| Height gauge | — | Each spindle has 2 height gauge: inner and outer mechanical IPG (in-line process gauge) on Z1 and Z2 spindles respectively[5] |
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