Waferpedia

Comparison ledger

321versus7 AF Wafer

Disco 321, Strasbaugh 7 AF Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
7 AF WaferStrasbaugh
OEMDiscoStrasbaugh
CategoryDicing & GrindingDicing & Grinding
Wafer size—Wafer handler
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Strasbaugh 7 AF Wafer
Specifications
OEMDisco[1]—
Model321[1]—
Equipment typeWafer Dicing Saw[1]Wafer grinder[4]
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Date of Audit—9/12/25[4]
Configuration—Can produce wafers as-is[4]
Wafer size—Wafer handler[4]
Robot Type—Genmark[4]
SystemSW (App) Version—7.25.0[4]
Power—208 V, 3 phase, 60 Hz[4]
Frequency—60 Hz[5]
Phase—3 Phase[5]
Voltage—230 V[5]
Full Load Amp—45 A[5]
Tapeless backgrinding—Listed[5]
In-feed technology—Listed[5]
In-situ thickness control—Listed[5]
Force adaptive grinding—Listed[5]
Linear traversing grind spindles—Listed[5]
Automated process control—Listed[5]
Thin wafer handling—Listed[5]
Wafer handler—Listed[4]
Cassette / FOUP loaders—2[4]
Pre-aligner—Listed[4]
Mini environment—Listed[4]
SystemSW version—7.25.0[4]
GEM / SECS—Listed[4]
Ethernet—Listed[4]
Heat exchange / chiller—Listed[4]
CDA—Listed[4]
DIW—Listed[4]
Vacuum—Listed[4]
Full load amp—20 A[6]
No field modifications—Listed[4]
No power supply—Listed[4]
No external transformer—Listed[4]
No UPS—Listed[4]
No corrosion visible on modules—Listed[4]
No backing pumps—Listed[4]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing