Comparison ledger
Disco 321, Disco DTG 8460 Taiko, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | DTG 8460 TaikoDisco |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco DTG 8460 |
| Cited variants | — |
|
| Specifications | ||
| OEM | Disco[2] | — |
| Model | 321[2] | — |
| Equipment type | Wafer Dicing Saw[2] | — |
| Facility context | Cleanroom Instrumentation[2] | — |
| Application area | Nano and Micro Fabrication[2] | — |
| Location | FNT 4.106[2] | — |
| Wafer Size | Up to 6 inches[3] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[4] | — |
| Spindle Power (alternate) | 1500 Watt spindle[3] | — |
| Non-Contact Setup | Non Contact Setup[4] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[4] | — |
| Broken Blade Detection | Broken Blade Detection[4] | — |
| Light Tower | Includes Light Tower[4] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[3] | — |
| Wafer size capability | Up to 6" wafers[4] | — |
| Chuck | 6-inch porous film frame chuck[3] | — |
| Spindle power | 1500-watt spindle[3] | — |
| Footprint | Small footprint[3] | — |
| Setup | Non-contact setup[4] | — |
| Blade break detection | Broken blade detection[4] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[4] | — |
| Configuration | — | 3 Chucks[5] |
| Phase | — | 200-2008 V, 50 A, 50/60 Hz, 3 Phase[5] |
| Voltage | — | 208 V[6] |
| Wafer size | — | 12 inch[5] |
| Process type | — | Cassette to Cassette[5] |
| Number of chucks | — | 3[5] |
| Current | — | 50 A[5] |
| Frequency | — | 50/60 Hz[5] |
| Add-on chiller | — | DTU 1531[5] |
| Accessories | — | USV, Duct Unit, Vacuum Unit[5] |
| Vintage year | — | 2012[7] |
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