Comparison ledger
CEE 100, SUSS MicroTec MA 6 BA 6 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100CEE | MA 6 BA 6 MaskSUSS MicroTec |
|---|---|---|
| OEM | CEE | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | 6" | Wafer chuck (1) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 100 | SUSS MicroTec MA 6 Mask |
| Cited variants |
| |
| Specifications | ||
| Tool type | Spray Developer[1] | — |
| Accepts wafer size | up to 6" wafers[5] | — |
| Programmable programs | 10 programs[5] | — |
| Steps per program | up to 10 steps[5] | — |
| Programmable step parameters | Acceleration, Speed, Time[5] | — |
| Associated document | CEE Model 100CB Spinner.doc[5] | — |
| Wafer size | Up to 6 inches[5] | Wafer chuck (1)[6] |
| Programs | 10 programs each with up to 10 steps[5] | — |
| Control parameters | Acceleration, Speed, Time[5] | — |
| Configuration | — | 200-240 V[4] |
| Full Load | — | 10 A[4] |
| Protection | — | 16 A[4] |
| Objectives | — | 5x ,10x , 20x[6] |
| Power | — | 350 W lamphouse[6] |
| System power | — | 230 V, 50/60 Hz[6] |
| Voltage | — | 230 V[3] |
| Make | — | SUSS[4] |
| Model | — | MA 6 / BA 6[4] |
| Alignment | — | TSA (Top-Side Alignment), BSA (Back-Side Alignment)[2] |
| Wafer sizes | — | 2, 3, 4, 5, 6 inch[6] |
| Supports | — | 365 nm and 405 nm exposure wavelengths[6] |
| Lamphouse | — | 350 W[6] |
| Load | — | Single Load[4] |
| Top-Side Alignment (TSA) | — | Supported[6] |
| Back-Side Alignment (BSA) | — | Supported[6] |
| Microscope | — | Suss DVM6 Microscope[6] |
| Optics | — | UV400 optics (supports 365 nm and 405 nm exposure wavelengths)[6] |
| Power supply | — | Gen2 CIC power supply[6] |
| Contact modes | — | Soft, Hard, Vacuum[6] |
| Wafer chuck | — | 1[6] |
| Mask holder | — | 1[6] |
| Vibration-isolation table | — | Included (for MA6)[6] |
| HDD and software | — | Included[6] |
| Voltage range | — | 200-240 V[4] |
| Full load current | — | 10 A[4] |
| Protection current | — | 16 A[4] |
| Power rating (VA) | — | 1500 VA[3] |
| Optical BSA | — | Supported[3] |
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