Waferpedia

Comparison ledger

100 SpinversusACS 300

CEE 100 Spin, SUSS MicroTec ACS 300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
ACS 300SUSS MicroTec
OEMCEESUSS MicroTec
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100SUSS MicroTec ACS 300
Specifications
ConfigurationVolts 115[1]Developer (4)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing