Waferpedia

Comparison ledger

100 SpinversusWS-650-15 B

CEE 100 Spin, Laurell WS-650-15 B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEELaurell
CategoryResist ProcessingResist Processing
Wafer size—300mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100Laurell WS-650-15 B
Specifications
ConfigurationVolts 115[1]—
Type—Spin Coater[2]
Controller—650-series[2]
Max Substrate Size—ø 300mm (9" × 9")[2]
Max RPM—12000 rpm[2]
Mounting Options—Tabletop, In-Deck, On-Deck[2]
OEM—Laurell[3]
Model—WS-650-15 B[3]
Series—650-series[3]
Max substrate size—ø 300mm wafers and 9" × 9" (229mm × 229mm) substrates[3]
Category—Spin Coater[2]
Processes supported—Coating, Etching, Developing, Rinsing-Drying and Cleaning[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]images.laurell.comimages.laurell.com
  3. [3]laurell.comlaurell.com