Comparison ledger
CEE 100 Spin, EV Group 120 Automated Coater Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100 SpinCEE | 120 Automated Coater ProcessingEV Group |
|---|---|---|
| OEM | CEE | EV Group |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 100 | EV Group 120 Automated Coater Processing |
| Specifications | ||
| Configuration | Volts 115[1] | 50/60 Hz[2] |
| Phase | — | 3 Phase[2] |
| Wafer sizes | — | 6 inch, 8 inch[2] |
| Frequency | — | 50/60 Hz[2] |
| Wiring configuration | — | 4 Wire + GND[2] |
| Vintage | — | 2015[2] |
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