Waferpedia

Comparison ledger

103-754versusS-302-4

Cascade Microtech 103-754, Signatone S-302-4, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
103-754Cascade Microtech
S-302-4Signatone
OEMCascade MicrotechSignatone
CategoryTest & ProbeTest & Probe
Wafer size6-inch diameter microchamber and thermal chuck100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech 103-754Signatone S-302-4
Specifications
typex-y-z-θ probe positioner[1]—
installed onHFTL 50-GHz Small-Signal Probe Station[1]—
quantity in stationtwo[1]—
station chuck size6-inch-diameter microchamber and thermal chuck[1]—
Quantity per stationTwo positioners[1]—
Chuck size6-inch-diameter microchamber and thermal chuck[1]—
Temperature range-50 to 200 °C[1]—
Type—Four Point Resistivity Probe Station[2]
Probe stand—100 mm[2]
Probe head—4 point probe head with 5 mil radius tips of 40 mil spacing[2]
Measurement use—Sheet resistance and resistivity measurements of substrates and thin films[2]
Interfaces with—Keithley 2450[2]
Probe stand size—100 mm[2]
Measurement capabilities—Sheet resistance and resistivity measurements of substrates and thin films[2]
Interfaces—Keithley 2450[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]cnf.cornell.educnf.cornell.edu
  2. [2]smif.pratt.duke.edusmif.pratt.duke.edu