Comparison ledger
Canon FPA 3000 EX 5 Fine Pattern, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | Canon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1998 Vintage · 1999 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3000 | Ultratech 1000 Family |
| Specifications | ||
| Configuration | Cymer ELS 5310[1] | — |
| Laser source | Cymer ELS 5310[1] | — |
| Chamber | Rasco TWB-CD-110 Compact Chamber[2] | — |
| Make | Canon[1] | — |
| Model | FPA 3000 EX 5[1] | — |
| Equipment type | Fine Pattern Aligner[1] | — |
| Vintage | 1998[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[5] |
| Optical design | — | Wynne Dyson[5] |
| Magnification | — | 1X[5] |
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