Comparison ledger
Canon 5500 iZA, EV Group 101, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 5500 iZACanon | 101EV Group |
|---|---|---|
| OEM | Canon | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon 5500 iZA | EV Group 101 |
| Cited variants |
| — |
| Specifications | ||
| Model type | i-Line (365nm) Stepper[2] | — |
| Wafer size | 300mm; 200mm[2] | — |
| Resolution | ≤0.35μm[2] | — |
| Numerical Aperture (NA) | 0.45 ~ 0.57[2] | — |
| Reticle size | 6in. (0.25in. thick)[2] | — |
| Reduction ratio | 4:1[2] | — |
| Field size | 26mm x 33mm[2] | — |
| Overlay accuracy | ≤ 16nm (M+3)[2] | — |
| Throughput | ≥93wph (300mm); ≥155wph (200mm)[2] | — |
| Exposure wavelength | i-line (365nm)[2] | — |
| Lamp | 4.5kW high-pressured mercury lamp[2] | — |
| Overlay accuracy achieved | 16nm through reticle magnification compensation and through improvements in Z and tilt compensation accuracy, stage environment control accuracy, and calibration accuracy[2] | — |
| Platform | FPA-5000 platform[2] | — |
| Manufacturer | Canon[3] | — |
| Model | 5500 iZA[3] | 101[4] |
| Tool type | i-line stepper lithography system[1] | — |
| Last confirmed date | August 22, 2023[3] | — |
| OEM | — | EV Group[4] |
| Equipment name | — | EVG 101 Spray Coater[4] |
| NEMO ID | — | evgspraycoat[4] |
| Training required | — | EVG 101 Training[4] |
| Training duration | — | 1.50 hours[4] |
| Processing technique | — | Resist Spray Coat (manual)[4] |
| Cleanliness | — | "All"[4] |
| Location | — | SNF Paul G Allen L107 Cleanroom[4] |
| Wafer diameter (substrate size) | — | up to 300 mm[5] |
| Available modules | — | Spin coat / OmniSpray® / develop[5] |
| Wafer handling options | — | Bowed / warped / thin wafer handling, edge handling[5] |
| Dispense options | — | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[5] |
| Processing technique (at SNF) | — | Resist Spray Coat (manual)[6] |
| Cleanliness group (at SNF) | — | "All"[4] |
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