Waferpedia

Comparison ledger

Beta Seriesversus120 Continuous

Buehler Beta Series, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBuehlerLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Beta SeriesLapmaster 120 Continuous
Specifications
ConfigurationTwin Variable Speed[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing