Comparison ledger
Bruker Dimension Fastscan, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Dimension FastscanBruker | |
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker Dimension | KLA .496 PSL Wafer |
| Specifications | ||
| X-Y scan range | 35um x 35um typical / 30um minimum[1] | — |
| Z range | >/= 3um[2] | — |
| Vertical Noise floor | <40pm RMS, sensor in appropriate environment (up to 625Hz)[2] | — |
| X-Y tip-velocity max (1% tracking error) | >2mm/sec[2] | — |
| Z tip-velocity max | 12mm/sec[2] | — |
| X-Y position noise (closed -loop) | =0.20nm RMS typical imaging BW (up to 2.5kHz in adaptive)[2] | — |
| Z sensor noise level | 30pm RMS typical imaging BW (up to 625Hz)[2] | — |
| X-Y flatness (30um range) | =3nm[2] | — |
| Integral nonlinearily (X-Y-Z) | <0.50%[2] | — |
| Configuration | Sample size/holder:[2] | NIST Traceable[4] |
| Motorized position stage | X & Y axis:[2] | — |
| Instrument type | Atomic force microscope (AFM)[2] | — |
| Model | Dimension FastScan[3] | — |
| Vertical noise floor | < 40 pm RMS, sensor in appropriate environment (up to 625 Hz)[2] | — |
| X-Y tip-velocity max | > 2 mm/sec (1% tracking error)[2] | — |
| X-Y position noise | = 0.20 nm RMS typical imaging BW (up to 2.5 kHz in adaptive)[2] | — |
| X-Y flatness | = 3 nm (30 um range)[2] | — |
| Integral nonlinearity | < 0.50% (X-Y-Z)[2] | — |
| Sample size/holder | 210 mm vacuum chuck for samples; <= 210 mm in diameter; <= 15 mm thick[2] | — |
| Additional sample handling | 300 mm vacuum chuck; magnet holder[2] | — |
| Microscope optics | 5 MP digital camera; 130 um to 1040 um viewing area; digital zoom and motorized focus[2] | — |
| Controller/software | NanoScope V / NanoScope v8.15 and later[2] | — |
| AFM modes | Standard, ScanAsyst, Nanomechanical Mapping, TappingMode (air), TappingMode (fluid), PhaseImaging, Contact Mode, Lateral Force Microscopy, Lift Mode, MFM, EFM, Force Spectroscopy, Force Volume[2] | — |
| Purpose | Scanning probe microscopy of various sample types; equipped with FastScan and ICON scanners[1] | — |
| AFM description | Capable of mapping surfaces with nanoscale lateral resolution and sub-nanometer depth resolution[1] | — |
| Scan rate | > 125 Hz when surveying a sample; 1-second per image frame in air or fluid[3] | — |
| Sample access | High scan rates independent of sample size; large sample access[3] | — |
| Can scan in | Air or fluid[3] | — |
| Controller | NanoScope 6 AFM Controller[3] | — |
| Environment drift rate | Less than 200 pm per minute of drift rate over hours[3] | — |
| Sample holder | Open-access platform with large- or multiple-sample holders[3] | — |
| AFM Modes | Standard[2] | — |
| System Reliability | 2%[2] | — |
| E-Box | 03/01/2024[2] | — |
| Z Scanner | 01/03/2024[2] | — |
| HV Amplifier | 01/2024[2] | — |
| Stage Controller | 08/10/2021[2] | — |
| Nanoscope NS5 Controller | 07/28/2020[2] | — |
| Wafer size | — | 8 inch[4] |
| Traceability | — | NIST Traceable[4] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[4] |
| Category | — | Metrology & Inspection[5] |
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