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017-0146-01 PrealignerversusNSR 2205 i 10 D i-Line

Brooks 017-0146-01 Prealigner, Nikon NSR 2205 i 10 D i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
NSR 2205 i 10 D i-LineNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NSR 2205
Specifications
Configuration—0.45um[1]
Type—i-line stepper[2]
Wafer sizes—6-inch and 8-inch[1]
Resolution—0.45um[1]
017-0146-01 Prealigner entryNSR 2205 i 10 D i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com