Comparison ledger
Brooks 017-0146-01 Prealigner, EV Group 420 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 420 MaskEV Group |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | EV Group 420 Mask |
| Specifications | ||
| Configuration | — | Can only align wafers[1] |
| Wafer size | — | 6 inch[1] |
| Model designation | — | EV420[2] |
| Alignment capability | — | Can only align wafers; no exposure optics[1] |
| Serial number | — | AL4/2 011242007[2] |
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