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Comparison ledger

017-0024-01 PrealignerversusNSR 4425 i i-Line

Brooks 017-0024-01 Prealigner, Nikon NSR 4425 i i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1996 Vintage year
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerNikon NSR
Specifications
Configuration—0.35um[1]
Resolution—0.35 µm[1]
Wafer size—8 inch[1]
Category—Lithography[2]
Vintage year—1996[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com