Comparison ledger
Blue M 0 V 500, YES 6112, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | 6112YES |
|---|---|---|
| OEM | Blue M | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | 8 in. wafers |
| Process node | — | — |
| Introduced | — | 2000 |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | YES 6112 |
| Specifications | ||
| Capacity | — | 4 cassettes of 8 in. wafers[1] |
| Cleanliness | — | < 10 x 0.5 - micron particles per 8-in. wafer[1] |
| Throughput | — | 2 full loads/hr.[1] |
| HMDS usage | — | <7 ml/200 wafers (>50 prime cycles/pint)[1] |
| Temperature | — | 160°C max[1] |
| Outer system | — | stainless steel[1] |
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